Structure and method to increase contact area in unmerged EPI integration for CMOS FinFETs

ABSTRACT

Source/drain contact structures with increased contact areas for a multiple fin-based complementary metal oxide semiconductor field effect transistor (CMOSFET) having unmerged epitaxial source/drain regions and methods for forming such source/drain contact structures are provided by forming wrap-around source/drain contact structures for both n-type FinFETs and p-type FinFETs. Each of first source/drain contact structures for the n-type FinFETs includes at least one first conductive plug encapsulating epitaxial first source/drain regions on one side of a gate structure, while each of second source/drain contact structures for the p-type FinFETs includes at least a contact metal layer portion encapsulating epitaxial second source/drain regions on one side of the gate structure, and a second conductive plug located over a top surface of the contact metal layer portion.

BACKGROUND

The present application relates to semiconductor devices and, moreparticularly to a source contact structure and a drain contact structurein fin-based complementary metal oxide semiconductor field effecttransistors having unmerged epitaxial source region and an unmergedepitaxial drain region.

As integrated circuits continue to scale downward in size, fin fieldeffect transistors (FinFETs) are becoming increasingly attractive to beused in smaller nodes, e.g., 22 nm node and beyond. Use of multiple finswith an unmerged epitaxial source region and an unmerged epitaxial drainregion (hereinafter collectively referred to as “unmerged epitaxialsource/drain regions) enables further tailoring of device specificationand increased performed. However, with unmerged epitaxial source/drainregions, there is significant loss of contact area since the sourcecontact and the drain contact (hereinafter collectively referred to assource/drain contacts) are typically formed over top portions of theepitaxial source/drain regions and most of the epitaxial source/drainregions are covered by an interlayer dielectric layer (ILD) layerthrough which the source/drain contacts are formed. The limited contactarea can lead to high source/drain contact resistance which in turndegrades device performance. Therefore, there remains a need to improvesource/drain contact area for multiple fin FETs with unmerged epitaxialsource/drain regions.

Moreover, in a typical process for forming source/drain contacts,contact openings are first etched through the ILD layer and the contactopenings are subsequently filled with a metal to form electricalcontacts that are in direct contact with the epitaxial source/drainregions. When using an anisotropic etch to form the contact openings, anover-etch is typically performed in order to remove the dielectricmaterial of the ILD layer completely from surfaces of the epitaxialsource/drain regions. This over-etch may damage the epitaxialsource/drain regions, especially when a silicon germanium alloy (i.e.,SiGe) with a high Ge content is employed to form the epitaxialsource/drain regions. Therefore, there remains a need to protect theepitaxial source/drain regions during the etch process in forming thesource/drain contact openings.

SUMMARY

The present application provides source/drain contact structures withincreased contact areas for a multiple fin-based complementary metaloxide semiconductor field effect transistor (CMOSFET) having unmergedepitaxial source/drain regions and methods for forming such source/draincontact structures.

In one aspect of the present application, a method of forming asemiconductor structure is provided. The method includes first formingat least one gate structure over a channel portion of each of aplurality of first semiconductor fins and a plurality of secondsemiconductor fins. A first semiconductor material is epitaxially grownon portions of each of the plurality of first semiconductor fins thatare not covered by the at least one gate structure to provide firstepitaxial source/drain regions. Adjacent first epitaxial source/drainregions are separated by a first gap. Next, a second semiconductormaterial is epitaxially grown on portions of each of the plurality ofsecond semiconductor fins that is not covered by the at least one gatestructure to provide second epitaxial source/drain regions. Adjacentsecond epitaxial source/drain regions are separated by a second gap.After forming an interlevel dielectric (ILD) layer over the substrate tocover the at least one gate structure, the first epitaxial source/drainregions and the second epitaxial source/drain regions, a pair of firstsource/drain contact openings and a pair of second source source/draincontact openings are formed through the ILD layer on the opposite sidesof the gate structure. Each of the first source/drain contact openingsexposes an entirety of the first epitaxial source/drain regions on oneside of the gate structure, and each of the second source/drain contactopenings exposes an entirety of the second epitaxial source/drainregions on one side of the gate structure. Next, first contact metallayer portions are formed within the first source/drain contact openingsand second contact metal layer portions are formed within the secondsource/drain contact openings. The first contact metal layer portionscompletely fill each first gap between the adjacent first epitaxialsource/drain regions, and the second contact metal layer portionscompletely fill each second gap between the adjacent second epitaxialsource/drain regions. The first contact metal layer portions are thenremoved to re-expose first epitaxial source/drain regions in the firstsource/drain contact openings. Next, a contact liner layer is formed onexposed surfaces of the first source/drain contact openings, the firstepitaxial source/drain regions, the second epitaxial source/draincontact openings and the second contact metal layer portions. Portionsof the contact liner layer in the first source/drain contact openingsconform to the exposed surfaces of the first epitaxial source/drainregions. A conductive fill layer within the first source/drain contactopenings and the second source/drain contact openings is then formed tofill a remaining volume of each of the first source/drain contactopenings and the second source/drain contact openings.

In another aspect of the present application, a semiconductor structureis provided. The semiconductor structure includes a plurality of firstsemiconductor fins located on a first region of a substrate and aplurality of second semiconductor fins located a second region of thesubstrate. Each of the plurality of first semiconductor fins has achannel region disposed between a pair of first epitaxial source/drainregions, and adjacent first epitaxial source/drain regions are separatedby a first gap. Each of the plurality of second semiconductor fins has achannel region disposed between a pair of second epitaxial source/drainregions, and adjacent epitaxial second source/drain regions areseparated by a second gap. The semiconductor structure further includesa gate structure overlying the channel portion of each of the pluralityof first semiconductor fins and the plurality of second semiconductorfins, a pair of first source/drain contact structures electricallycoupled to the first epitaxial source/drain regions located on eitherside of the gate structure, and a pair of second source/drain contactstructures electrically coupled to the second epitaxial source/drainregions located on either side of the gate structure. Each of the firstsource/drain contact structures includes at least a first conductiveencapsulating the first epitaxial source/drain regions on one side ofthe gate structure and in contact with all surfaces of the epitaxialfirst source/drain regions, and each of the second source/drain contactstructures includes at least a contact metal layer portion encapsulatingthe second epitaxial source/drain regions on one side of the gatestructure and in contact with all surfaces of the second epitaxialsource/drain regions and a second conductive plug located on a topsurface of the contact metal layer portion.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional view of an exemplary semiconductor structureincluding a plurality of first semiconductor fins for a firstconductivity semiconductor device and a plurality of secondsemiconductor fins for a second conductivity semiconductor device formedon a substrate in accordance with an embodiment of present application.

FIG. 2A is a perspective view of the exemplary semiconductor structureof FIG. 1 after forming a gate structure over a channel portion of eachof the plurality of first semiconductor fins and the plurality of secondsemiconductor fins.

FIG. 2B is a cross-sectional view of the exemplary semiconductorstructure of FIG. 2A along line x-x′.

FIG. 3A is a perspective view of the exemplary semiconductor structureof FIGS. 2A-2B after forming first epitaxial source/drain regions andsecond epitaxial source/drain regions.

FIG. 3B is a cross-sectional view of the exemplary semiconductorstructure of FIG. 3A along line y-y′.

FIG. 4 is a cross-sectional view of the exemplary semiconductorstructure of FIGS. 3A-3B after forming an interlevel dielectric (ILD)layer over the substrate to cover the gate structure, the firstepitaxial source/drain regions and the second epitaxial source/drainregions.

FIG. 5 is a cross-sectional view of the exemplary semiconductorstructure of FIG. 4 after forming first source/drain contact openingsand second source/drain contact openings through the ILD layer.

FIG. 6 is a cross-sectional view of the exemplary semiconductorstructure of FIG. 5 after forming a contact metal layer in the first andthe second source/drain contact openings.

FIG. 7 is a cross-sectional view of the exemplary semiconductorstructure of FIG. 6 after recessing the contact metal layer to providefirst contact metal layer portions in the first source/drain contactopenings and second contact metal layer portions in the secondsource/drain contact openings.

FIG. 8 is cross-sectional view of the exemplary semiconductor structureof FIG. 7 after removing first contact metal layer portions from thefirst source/drain contact openings.

FIG. 9 is a cross-sectional view of the exemplary semiconductorstructure of FIG. 8 after forming a conformal contact liner materiallayer.

FIG. 10 is a cross-sectional view of the exemplary semiconductorstructure of FIG. 9 after forming first source/drain contact structuresand second source/drain contact structures.

FIG. 11A is a cross-sectional view of the exemplary semiconductorstructure of FIG. 3A along line x-x′ after forming a nitride cap layeron exposed surfaces of the gate structures, the first epitaxialsource/drain regions, the second epitaxial source/drain regions and thesubstrate.

FIG. 11B is a cross-sectional view of the exemplary semiconductorstructure of FIG. 3A along line y-y′ after forming a nitride cap layeron exposed surfaces of sacrificial gate structures, the first epitaxialsource/drain regions, the second epitaxial source/drain regions and thesubstrate.

FIGS. 12A-12B are cross-sectional views of the exemplary semiconductorstructure of FIGS. 11A-11B after forming organic planarization layer(OPL) portions.

FIGS. 13A-13B are cross-sectional views of the exemplary semiconductorstructure of FIGS. 12A-12B after forming gaps between the firstepitaxial source/drain regions and the second epitaxial source/drainregions.

FIGS. 14A-14B are cross-sectional views of the exemplary semiconductorstructure of FIGS. 13A-13B after removing portions of the nitride caplayer that are exposed by the OPL portions to provide nitride cap layerportions and subsequently removing the OPL portions.

FIGS. 15A-15B are cross-sectional views of the exemplary semiconductorstructure of FIGS. 14A-14B after forming an ILD layer.

FIGS. 16A-16B are cross-sectional views of the exemplary semiconductorstructure of FIGS. 15A-15B after forming functional gate structures.

FIGS. 17A-17B are cross-sectional views of the exemplary semiconductorstructure of FIGS. 16A-16B after forming first source/drain contactopenings and second source/drain contact openings through the ILD layer.

FIGS. 18A-18B are cross-sectional views of the exemplary semiconductorstructure of FIGS. 17A-17B after removing portions of the nitride caplayer portions that are exposed in the first and second source/draincontact openings.

DETAILED DESCRIPTION

The present application will now be described in greater detail byreferring to the following discussion and drawings that accompany thepresent application. It is noted that the drawings of the presentapplication are provided for illustrative purposes only and, as such,the drawings are not drawn to scale. It is also noted that like andcorresponding elements are referred to by like reference numerals.

In the following description, numerous specific details are set forth,such as particular structures, components, materials, dimensions,processing steps and techniques, in order to provide an understanding ofthe various embodiments of the present application. However, it will beappreciated by one of ordinary skill in the art that the variousembodiments of the present application may be practiced without thesespecific details. In other instances, well-known structures orprocessing steps have not been described in detail in order to avoidobscuring the present application.

Referring to FIG. 1, there is illustrated an exemplary semiconductorstructure that can be employed according to an embodiment of the presentapplication. Specifically, the semiconductor structure includes asubstrate 8 having a plurality of first semiconductor fins 10 a for afirst conductivity semiconductor device, e.g., n-type FinFET, and aplurality of second semiconductor fins 10 b for a second conductivitysemiconductor device, e.g., p-type FinFET, formed thereupon.

In one embodiment, the semiconductor fins 10 a, 10 b can be formed froma bulk substrate including a bulk semiconductor material throughout (notshown). In another embodiment and as shown in FIG. 1, the semiconductorfins 10 a, 10 b and the substrate 8 may be provided from asemiconductor-on-insulator (SOI) substrate, in which the topsemiconductor layer of the SOI substrate provides the semiconductor fins10 a, 10 b and the buried insulator layer provides the substrate 8. TheSOI substrate typically includes, from bottom to top, a handle substrate(not shown), a buried insulator layer (i.e., substrate 8) and a topsemiconductor layer (not shown).

The handle substrate may include a semiconductor material, such as, forexample, Si, Ge, SiGe, SiC, SiGeC, and III/V compound semiconductors.The handle substrate provides mechanical support to the buried insulatorlayer 8 and the top semiconductor layer. The thickness of the handlesubstrate can be from 30 μm to about 2 mm, although less and greaterthicknesses can also be employed.

The buried insulator layer may include a dielectric material such assilicon oxide, silicon nitride, silicon oxynitride, or a combinationthereof. The thickness of the buried insulator layer can be from 50 nmto 200 nm, with a thickness from 100 nm to 150 nm being more typical.

The top semiconductor layer may include a semiconductor material suchas, for example, Si, Ge, SiGe, SiC, SiGeC, and III/V compoundsemiconductors such as, for example, InAs, GaAs, and InP. Thesemiconductor materials of the top semiconductor layer and the handlesubstrate may be the same or different. Typically, each of the handlesubstrate and the top semiconductor layer comprises a single crystallinesemiconductor material, such as, for example, single crystallinesilicon. The top semiconductor layer may or may not be doped with p-typedopants and/or n-type dopants. Examples of p-type dopants include, butare not limited to, boron, aluminum, gallium and indium. Examples ofn-type dopants, include but are not limited to, antimony, arsenic andphosphorous. The thickness of the top semiconductor layer can be from 10nm to 200 nm, with a thickness from 30 nm to 70 nm being more typical.

In some embodiments of the present application, a hard mask layer (notshown) can be formed on the top semiconductor layer prior to forming thesemiconductor fins. When employed, the hard mask layer may comprise anoxide, nitride, oxynitride or any combination thereof includingmultilayers. In one embodiment, the hard mask layer includes siliconoxide or silicon nitride. The hard mask layer can be formed utilizing aconventional deposition process such as, for example, chemical vapordeposition (CVD), plasma enhanced chemical vapor deposition (PECVD),chemical solution deposition, evaporation or other like depositionprocesses. Alternatively, the hard mask layer can be formed by a thermalprocess such as, for example, oxidation or nitridation of the topsemiconductor layer. Any combination of the above mentioned processescan also be used in forming the hard mask layer. The hard mask layerthat is formed can have a thickness from 20 nm to 80 nm, with athickness from 30 nm to 60 nm being more typical.

In one embodiment, the semiconductor fins 10 a, 10 b can be formed bylithography and etching. The lithographic step includes applying aphotoresist layer (not shown) atop the top semiconductor layer (or thehard mask, if present), exposing the photoresist layer to a desiredpattern of radiation, and developing the exposed photoresist layerutilizing a conventional resist developer. The etching process comprisesdry etching and/or wet chemical etching. Illustrative examples ofsuitable dry etching processes that can be used in the presentapplication include reactive ion etch (RIE), ion beam etching, plasmaetching or laser ablation. Typically, a RIE process is used. The etchingprocess transfers the pattern from the patterned photoresist layer tothe top semiconductor layer or first to the hard mask layer, if present,and thereafter to the underlying top semiconductor layer utilizing theburied insulator layer as an etch stop. After transferring the patterninto the top semiconductor layer, the patterned photoresist layer can beremoved utilizing a conventional resist stripping process such as, forexample, ashing. Alternatively, the semiconductor fins 10 a, 10 b canalso be formed utilizing a sidewall image transfer (SIT) process. In atypical SIT process, spacers are formed on a sacrificial mandrel. Thesacrificial mandrel is removed and the remaining spacers are used as ahard mask to etch the top semiconductor layer. The spacers are thenremoved after the semiconductor fins have been formed.

Each of the semiconductor fins 10 a, 10 b that is formed may have aheight ranging from 5 nm to 150 nm, with a height ranging from 10 nm to50 nm being more typical. Each of the semiconductor fins 10 a, 10 b mayhave a width ranging from 3 nm to 50 nm, with a width ranging from 10 nmto 20 nm being more typical. Adjacent semiconductor fins 10 a, 10 b maybe separated by a pitch ranging from 20 nm to 100 nm, with a pitchranging from 30 nm to 50 nm being more typical.

In some embodiments of the present application and when the hard masklayer is present, the hard mask layer that remains atop thesemiconductor fins 10 a, 10 b can be removed at this stage. The removalof the remaining non-etched portion of hard mask layer can be achievedby performing a selective etching process or by utilizing aplanarization process such as chemical mechanical planarization (CMP).In some embodiments, a portion of the hard mask layer can remain atopeach of the semiconductor fins.

Referring to FIGS. 2A-2B, a gate structure is formed over a channelportion of each of the first and the second semiconductor fins 10 a, 10b. The gate structure transverses (i.e., straddles) the first and thesecond semiconductor fins 10 a, 10 b. Although only one gate structureis described and illustrated, the present application is not limited tosuch a number of gate structures. Instead, a plurality of gatestructures can be formed straddling each of the first and the secondsemiconductor fins 10 a, 10 b.

In one embodiment and as shown in FIGS. 2A-2B, the gate structure is afunctional gate structure. The term “functional gate structure” as usedherein denotes a permanent gate structure used to control output current(i.e., flow of carriers in the channel) of a semiconducting devicethrough electrical fields. The gate structure may include a gate stackand a gate spacer 28 formed on opposite sidewalls of the gate stack.Each gate stack includes, from bottom to top, a gate dielectric 22located on a top surface and sidewalls of each of first and the secondsemiconductor fins 10 a, 10 b, an overlying gate conductor 24 and a gatecap 26 atop the gate conductor 24.

The gate structure can be formed by first providing a material stack ofa gate dielectric layer, a gate conductor layer and a dielectric caplayer (each of which are not specifically shown) over the semiconductorfins 10 a, 10 b and the substrate 8.

The gate dielectric layer that provides the gate dielectric 22 of thegate structure can include an oxide, nitride or oxynitride. In oneexample, the gate dielectric layer can include a high-k material havinga dielectric constant greater than silicon dioxide. Exemplary high-kdielectrics include, but are not limited to, HfO₂, ZrO₂, La₂O₃, Al₂O₃,TiO₂, SrTiO₃, LaAlO₃, Y₂O₃, HfO_(x)N_(y), ZrO_(x)N_(y), La₂O_(x)N_(y),Al₂O_(x)N_(y), TiO_(x)N_(y), SrTiO_(x)N_(y), LaAlO_(x)N_(y),Y₂O_(x)N_(y), SiON, SiN_(x), a silicate thereof, and an alloy thereof.Each value of x is independently from 0.5 to 3 and each value of y isindependently from 0 to 2. In some embodiments, a multilayered gatedielectric structure comprising different gate dielectric materials,e.g., silicon dioxide, and a high-k gate dielectric can be formed.

The gate dielectric layer can be formed by any deposition techniqueincluding, for example, chemical vapor deposition (CVD), plasma enhancedchemical vapor deposition (PECVD), physical vapor deposition (PVD),atomic layer deposition (ALD) or sputtering. Alternatively, the gatedielectric layer can also be formed by a thermal growth process such as,for example, oxidation, nitridation or oxynitridation to convert surfaceportions of the semiconductor fins 10 a, 10 b into a dielectricmaterial. The gate dielectric layer that is formed can have a thicknessranging from 0.5 nm to 10 nm, with a thickness from 0.5 nm to about 3 nmbeing more typical.

The gate conductor layer that provides the gate conductor 24 of the gatestructure can include any conductive material including, for example,doped polysilicon, an elemental metal (e.g., tungsten, titanium,tantalum, aluminum, nickel, ruthenium, palladium and platinum), an alloyof at least two elemental metals, an elemental metal nitride (e.g.,tungsten nitride, aluminum nitride, and titanium nitride), an elementalmetal silicide (e.g., tungsten silicide, nickel silicide, and titaniumsilicide) or multilayered combinations thereof. In some embodiments, thegate conductor material for first semiconductor fins 10 a is differentfrom the gate conductor material for second semiconductor fins 10 b.Different gate conductor materials can be formed by utilizing block masktechnology.

The gate conductor layer can be formed utilizing a deposition processincluding, for example, CVD, PECVD, PVD, ALD, sputtering, or other likedeposition processes. In embodiments in which polysilicon or SiGe areused as the gate conductor material, an in-situ deposition process canbe used or alternatively deposition followed by ion implantation can beused. The gate conductor layer that is formed can have a thicknessranging from 50 nm to 200 nm, although lesser or greater thicknesses canalso be employed.

The dielectric cap layer used in providing the gate cap 26 of the gatestructure can be comprised of a dielectric oxide, nitride or oxynitride.In one embodiment of the present application, the dielectric cap layerincludes silicon nitride. The dielectric cap layer can be formed by adeposition process including, for example, CVD, PECVD, PVD, ALD orsputtering. The dielectric cap layer that is formed can have a thicknessranging from 25 nm to 100 nm, although lesser or greater thicknesses canalso be employed.

The material stack is then patterned and etched to provide the gatestack (22, 24, 26). Specifically, a pattern is produced by applying aphotoresist to a topmost surface of the material stack, exposing thephotoresist to a pattern of radiation, and then developing the patterninto the photoresist utilizing a resist developer. Once the patterningof the photoresist is completed, the sections of the material stackcovered by the photoresist are protected while the exposed regions areremoved using a selective etching process that removes the unprotectedregions.

Subsequently, the gate spacer 28 is formed on sidewalls of the gatestack (22, 24, 26). The gate spacer 28 can be formed by first depositinga conformal spacer material layer (not shown) on exposed surfaces of thegate dielectric 22, the gate conductor 24, the dielectric cap 26 and thesemiconductor fins 10 a, 10 b utilizing any conventional depositionprocess including, for example, CVD or ALD. Alternatively, a thermalgrowth process including oxidation and/or nitridation can be employed informing the spacer material layer. Following the formation of theconformal spacer material layer, horizontal portions of the conformalspacer material layer are removed by an anisotropic etch, such as, forexample, a RIE process. In one embodiment, the RIE process is continuedso that vertical portions of the conformal spacer material layer presenton the sidewalls of the semiconductor fins 10 a, 10 b are removed. Theremaining vertical portions of the conformal spacer material layerconstitute the gate spacer 28.

Materials used to form the gate spacer 28 may include a dielectricoxide, nitride or oxynitride. In one embodiment, the gate spacer 28 iscomposed of silicon nitride. The gate spacer 28 can have a thickness asmeasured at the bases ranging from 2 nm to 100 nm, with a thicknessranging from 6 nm to 10 nm being more typical.

In another embodiment, the gate structure is a sacrificial gatestructure for a replacement gate process and can be replaced with afunction gate structure after forming a source region and a drain region(collectively referred to hereinafter as “source/drain regions”)described below.

Referring to FIGS. 3A-3B, a first epitaxial semiconductor layer isformed on the top and sidewall surfaces of each of the firstsemiconductor fins 10 a to provide a first epitaxial source region and afirst epitaxial drain region (collectively referred to as firstepitaxial source/drain regions 32) on opposite sides of the gatestructure (22, 24, 26, 28) by a first epitaxial growth process, while asecond epitaxial semiconductor layer is formed on the top and sidewallsurfaces of each of the second semiconductor fins 10 b to provide asecond epitaxial source region and a second epitaxial drain region(collectively referred to as second epitaxial source/drain regions 34)on opposite sides of the gate structure (22, 24, 26, 28) by a secondepitaxial growth process.

The first epitaxial source/drain regions 32 and the second epitaxialsource/drain regions 34 can be formed utilizing block mask technology. Afirst mask layer (not shown) is first applied over the semiconductorfins 10 a, 10 b, the gate structure (22, 24, 26, 28) and the substrateand lithographically patterned so that the patterned first mask layercovers the second semiconductor fins 10 b, while exposing the firstsemiconductor fins 10 a that would be subjected to the epitaxialdeposition and ion implantation. The first mask layer may include anymaterial that can be easily patterned and removed without damaging theunderlying components. In one embodiment, the first mask layer includesamorphous carbon with hydrogen content less than about 15 atomic %. Thefirst epitaxial source/drain regions 32 can be formed by epitaxiallydepositing a first semiconductor material over top and sidewall surfacesof the first semiconductor fins 10 a, but not on dielectric surfacessuch as the surfaces of the gate cap 26, the gate spacer 26 and thesubstrate. In one embodiment, the first epitaxial source/drain regions32 may be composed of Si:C with the strain effect tuned to enhance theperformance of n-type FinFETs.

The first semiconductor material of the first epitaxial source/drainregions 32 can be deposited as an intrinsic semiconductor material, orcan be deposited with in-situ doping. If the first semiconductormaterial is deposited as an intrinsic semiconductor material, the firstepitaxial source/drain regions 32 can be subsequently doped (ex-situ)with an n-type dopant (e.g., P, As or Sb) utilizing ion implantation,gas phase doping, or dopant out diffusion from a sacrificial dopantsource material. After the formation of the first epitaxial source/drainregions 32, the patterned mask layer can be removed, for example, byoxygen-based plasma etching.

The second epitaxial source/drain regions 34 can be formed by performingthe processing steps described above with respect to the first epitaxialsource/drain regions 32. After forming a patterned second mask layer tocover the first semiconductor fins 10 a and expose the secondsemiconductor fins, a second semiconductor material is epitaxiallydeposited over top and sidewall surfaces of the second semiconductorfins 10 b, but not on dielectric surfaces such as the surfaces of thegate cap 26, the gate spacer 28 and the substrate 8. In one embodiment,the second epitaxial source/drain regions 34 may be composed of SiGewith the strain effect tuned to enhance the performance of p-typeFinFETs.

The second semiconductor material of the second epitaxial source/drainregions 34 can be deposited as an intrinsic semiconductor material, orcan be deposited with in-situ doping. If the second semiconductormaterial is deposited as an intrinsic semiconductor material, the secondepitaxial source/drain regions 34 can be subsequently doped (ex-situ)with a p-type dopant (e.g., B, Al, Ga or In) utilizing ion implantation,gas phase doping or dopant out diffusion from a sacrificial dopantsource material. After the formation of the second epitaxialsource/drain regions 34, the patterned second mask layer can be removed,for example, by oxygen-based plasma etching.

In some embodiments of the present application, the epitaxial growth ofthe silicon-containing semiconductor material can be effected by placingthe semiconductor structure into a reaction chamber, and simultaneously,or alternately, flowing at least one silicon source reactant gas (suchas SiH₄, Si₂H₆, SiH₂Cl₂, GeH₄, C₂H₂, C₂H₄) and an etchant gas (such asHCl) into the reaction chamber. Optionally, a carrier gas such as H₂,N₂, H₂, and/or Ar can be flowed into the reaction chamber. Thetemperature for epitaxial deposition typically ranges from 550° C. to1300° C. The apparatus for performing the epitaxial growth may include aCVD apparatus, such as atmospheric pressure CVD (APCVD), low pressureCVD (LPCVD) and PECVD.

The n-type dopants in the first epitaxial source/drain regions 32 andp-type dopants in the second epitaxial source/drain regions 34 can beactivated subsequently using a rapid thermal process. During theactivation, dopants within each of the first and the second epitaxialsource/drain regions 32, 34 diffuse into a corresponding portion of thesemiconductor fins 10 a, 10 b underlying that epitaxial source/drainregion 32, 34 to form a doped region within that semiconductor fin 10 a,10 b. Thus, an embedded source/drain region (not shown) is formedunderneath each of the first and the second epitaxial source/drainregions 32, 34.

In one embodiment and when top surfaces of the semiconductor fins 10 a,10 b have a (100) crystal orientation and sidewall surfaces of thesemiconductor fins 10 a, 10 b have (110) crystal orientation, due to thefact that growth rate on the (111) surfaces is slower than each of thaton the (110) surfaces and (100) surfaces, epitaxial deposition resultsin epitaxial source/drain regions 32, 34 with faceted surfaces. In oneembodiment, each of the faceted surfaces of epitaxial source/drainregions 32, 34 can become adjoined to at least another of the facetedsurfaces upon completion of the selective epitaxy process and orientedin a direction that is not parallel to, or perpendicular to, ahorizontal interface between the semiconductor fins 10 a, 10 b and thesubstrate 8. As used herein, a first surface adjoins a second surfacewhen an edge of the first surfaces coincides with an edge of the secondsurface. The extent of the epitaxial growth is limited to avoid mergingof adjacent semiconductor fins 10 a, 10 b, leaving a first gap 36between adjacent first epitaxial source/drain regions 32 and a secondgap 38 between adjacent second epitaxial source/drain regions 34. As aresult, the first epitaxial source/drain regions 32 are isolated fromeach other by the first gap 36, while the second epitaxial source/drainregions 34 are isolated from each other by the second gap 38.

Referring to FIG. 4, an interlevel dielectric (ILD) layer 40L is formedover the substrate 8, covering the gate structure (22, 24, 26, 28), thefirst epitaxial source/drain regions 32 and the second epitaxialsource/drain regions 34. The ILD layer 40L can include a dielectricmaterial such as undoped silicon oxide, doped silicon oxide, siliconnitride, porous or non-porous organosilicate glass, porous or non-porousnitrogen-doped organosilicate glass, or a combination thereof. The ILDlayer 40L can be formed by CVD, PVD or spin coating. If the ILDdielectric layer 40L is not self-planarizing, the top surface of the ILDlayer 40L can be planarized, for example, by CMP. The ILD dielectriclayer 40L may be planarized to expose the gate structure (22, 24, 26,28) for a replacement gate process.

Referring to FIG. 5, the ILD layer 40L is then etched to form a pair offirst source/drain contact openings 42 on opposite sides of the gatestructure (22, 24, 26, 28) in the n-type FinFET region and a pair ofsecond source/drain contact openings 44 on opposite sides of the gatestructure (22, 24, 26, 28) in the p-type FinFET region. The firstsource/drain contact opening 42 extends through the ILD layer 40L toexpose the first epitaxial source/drain regions 32 along with portionsof the substrate 8 in the n-type FinFET region. The second source/draincontact opening 44 extends through the ILD layer 40L to expose secondepitaxial source/drain regions 34 along with portions of the substrate 8in the p-type FinFET region.

The first and the source/drain contact openings 42, 44 can be formed,for example, by applying a photoresist (not shown) on the top surface ofthe ILD layer 40L, lithographically patterning openings in thephotoresist, and transferring the pattern of the openings in thephotoresist through the ILD layer 40L. An anisotropic etch having achemistry that removes the dielectric materials of the ILD layer 40Lselective to the semiconductor materials of the first and the secondepitaxial source/drain regions 32, 34 and the dielectric material of thesubstrate 8 can be employed to transfer the pattern into the ILD layer40L. After etching, remaining portions of the photoresist layer can beremoved by ashing. Remaining portions of the ILD layer 40L are hereinreferred to as ILD layer portions 40.

Referring to FIG. 6, a contact metal layer 46L is formed in the firstand the second source/drain contact openings 42, 44. In one embodiment,the contact metal layer 46L is deposited over the ILD layer portions 40,the first and the second epitaxial source/drain regions 32, 34 and thesubstrate 8 that are exposed within the first and the secondsource/drain contact openings 42, 44 by a conformal deposition process,such as, for example, CVD, PVD or atomic layer deposition (ALD). Thecontact metal layer 46L is deposited to a thickness sufficient tocompletely fill the first gap 36 and the second gap 38 and to cover thefirst and the second epitaxial source/drain regions 32, 34. In oneembodiment, the thickness of the contact metal layer 46 can be from 5 nmto 10 nm. The contact metal layer 46L may be composed of a bilayer oftitanium (Ti)/titanium nitride (TiN). The Ti layer may be deposited by,for example, PVD and the overlying TiN layer may then be deposited, forexample, by ALD.

Referring to FIG. 7, the contact metal layer 46L is recessed such that arecessed surface of the barrier layer 46L is above the top surfaces ofthe first and the second epitaxial source/drain regions 32, 34 by anetch back process. The etch back process can be a dry etch, such as, forexample, RIE. First portions of the remaining portions of the contactmetal layer 46L that are located within the first source/drain contactopenings 42 are herein referred to as first contact metal layer portions46 a, while second portions of the remaining portions of the contactmetal layer 46L that are located within the second source/drain contactopenings 44 are herein referred to as second contact metal layerportions 46 b.

Referring to FIG. 8, the first contact metal layer portions 46 a presentin the first source/drain contact openings 42 are removed. A mask layer(not shown) is applied and lithographically patterned so that apatterned mask layer 50 covers the second contact metal layer portion 46b located in the second source/drain contact openings 44, while exposingthe first contact metal layer portion 46 a located in the firstsource/drain contact openings 42. The first contact metal layer portions46 a are then removed by an etch, which can be a wet etch or a dry etch.In one embodiment and when the contact metal layer 46L is composed ofTi/TiN, the first contact metal layer portion 46 a may be wet etchedusing a SC1 solution (H₂O:NH₄OH:H₂O₂ mixture). Removal of the firstcontact metal layer portions 46 a re-exposes the first epitaxialsource/drain regions 32 in the first source/drain contacts openings 42.The patterned mask layer 50 may then be removed, for example, byoxygen-based plasma etching.

Referring to FIG. 9, a conformal contact liner material layer 52L isformed over exposed surfaces of the ILD layer portions 40, exposedsurfaces of the first epitaxial source/drain regions 32 and thesubstrate 8 in the first source/drain contact openings 42, and topsurfaces of the second contact metal layer portions 46 b in the secondsource/drain contact openings 44. The contact liner material layer 52Lmay include titanium, titanium nitride, tantalum, tantalum nitride,nickel, platinum, cobalt, tungsten, rhenium, palladium, erbium, hafnium,lanthanum or their alloys and may be formed utilizing a conformaldeposition process including CVD or ALD. The contact liner materiallayer 52L that is formed can have a thickness ranging from 1 nm to 5 nm.In one embodiment, the contact liner material layer 52L is 2 nm thick.

Referring to FIG. 10, a conductive fill material layer (not shown) isdeposited in the remaining portions of the source/drain contact openings42, 44 until the source/drain contract openings 42, 44 are completelyfilled. The conductive fill material layer may include a metal such as,for example, tungsten, aluminum, copper or their alloys. The conductivefill material layer can be formed by any suitable deposition method suchas, for example, CVD, PVD or plating.

The contact liner material layer 52L and conductive fill material layerare then planarized utilizing any conventional processes such as, forexample, CMP or RIE, where the ILD layer portions 40 are used as an etchstop. Remaining portions of the contact liner material layer 52L in thefirst source/drain contact openings 42 constitute first contact liner 52a, remaining portions of the contact liner material layer 52L in thesecond source/drain contact openings 44 constitute second contact liner52 b, remaining portions of the conductive fill material layer in thefirst source/drain contact openings 42 constitute first conductive plug54 a, and remaining portions of the conductive fill material layer inthe second source/drain contact openings 44 constitute second conductiveplug 54 b.

Thus, a pair of first source/drain contact structures is formed withinthe first source/drain contact openings 42 in the n-type FinFET region.The first source/drain contact structure (52 a, 54 a) wraps around eachof the first epitaxial source/drain regions 32 by conforming to upperand lower surfaces of the first epitaxial source/drain region 32. A pairof second source/drain contact structures is formed within the secondsource/drain contact openings 44 in the p-type FinFET region. The secondsource/drain contact structure (46 b, 52 b, 54 b) wraps around each ofthe second epitaxial source/drain regions 34 by conforming to upper andlower surfaces of the second epitaxial source/drain regions 34.

In the n-type FinFET region, each of the first source/drain contactstructure (52 a, 54 a) includes a first contact liner 52 a present onsidewalls and a bottom surface of the first source/drain contact opening42 and on the upper and lower surfaces of the first epitaxialsource/drain regions 32, and a first conductive plug 54 a present on thefirst contact liner 52 a. The first conductive plug 54 a completelyfills the first gap 36 between the first epitaxial source/drain regions32 and encapsulates the first epitaxial source/drain regions 32. Sincethe first source/source contact structures are formed on the firstepitaxial source/drain regions 32 in a wrap-around configuration,thereby establishing contact to entire first epitaxial source/drainregions 32, the source/drain contact area is advantageously increased inthe n-type FinFET region.

In the p-type FinFET region, each second source/drain contact structure(46 b, 52 b, 54 b) includes a second contact metal layer portion 46 bpresent in a lower portion of the second source/drain contact opening 44and covering the second source/drain regions 38, a second contact liner52 b present on sidewalls of the second source/drain contact opening 44and a top surface of the second contact metal layer portion 46 b and asecond conductive plug 54 b present on the second contact liner 52 b.The second contact metal layer portion 46 b completely fills the secondgap 38 between the second epitaxial source/drain regions 34 andencapsulates the second epitaxial source/drain regions 34. The secondconductive plug 54 b thus is located at a top portion of the secondsource/drain contact openings 44 above the second epitaxial source/drainregions 34. Since the second source/source contact structures are formedon the second epitaxial source/drain regions 34 in a wrap-aroundconfiguration, thereby establishing contact to entire second epitaxialsource/drain regions 34, the source/drain contact area is advantageouslyincreased in the p-type FinFET region.

The wrap-around configurations of the first source/drain contactstructures (52 a, 54 a) and the second/drain contact structures (46 b,52 b, 54 b) of the present application also allow to create adifferential stress on n-type FinFETs and p-type FinFETs because thefirst conductive plug 54 a encapsulated the first epitaxial source/drainregions 32 may impart a desirable stress on the n-type FinFETs, but asthere is no such conductive plug encapsulates the second epitaxialsource/drain regions 34, no equivalent stress is imparted on the p-typeFinFETs. As a result, the performances of the n-type FinFETs and p-typeFinFETs can be improved simultaneously.

In some embodiments of the present application, to avoid damages to theepitaxially deposited semiconductor materials of the first and thesecond epitaxial source/drain regions 32, 34 due to the contactover-etch during the formation of the source/drain contact openings 42,44, before forming the ILD layer 40L, a nitride cap layer may be formedon the first and the second epitaxial source/drain regions 32, 34 toprotect the first and the second source/drain regions during the etchingprocesses. The processes of forming such nitride cap layer areillustrated and described in FIGS. 11-18. As shown in FIGS. 11-18, thesemiconductor structure includes three sacrificial gate structures (122,124, 126, 28). Each of the sacrificial gate structures includes asacrificial gate stack and a spacer 28 formed on opposite sidewalls ofthe sacrificial gate stack. Each of the gate stacks includes, frombottom to top, a sacrificial gate dielectric 122, a sacrificial gateconductor 124 and a sacrificial gate cap 126. The sacrificial gatestructures can be formed using the processing steps of FIGS. 2A-2B.Exemplary materials that can be used as sacrificial gate dielectric 122include, but are not limited to, silicon oxide, silicon nitride, orsilicon oxynitride. Exemplary materials that can be used as sacrificialgate conductor 124 include, but are not limited to, polysilicon or asilicon-containing semiconductor alloy such as a silicon-germaniumalloy. Exemplary materials that can be used as sacrificial gate cap 126include, but are not limited to, silicon nitride or silicon oxide.

Referring to FIGS. 11A-11B, a nitride cap layer 60L is deposited overthe sacrificial gate structures (122, 124, 126, 28), the first and thesecond epitaxial source/drain regions 32, 34 and exposed surfaces of thesubstrate 8 of FIGS. 3A-3B. The nitride cap layer 60 is deposited as asingle contiguous layer which contacts all sidewalls of the sacrificialgate structures (122, 124. 126, 28) and top surfaces of the sacrificialgate caps 126. The nitride cap layer 60L also contacts upper and lowersurfaces of the first and the second epitaxial source/drain regions 32,34 and exposed surfaces of the substrate 8.

The nitride cap layer 60L, which has a good etch resistance to protectthe first and the second epitaxial source/drain regions 32, 34 from anydamage during subsequent etching of the ILD layer 40L in the formationof source/drain contact openings, may be composed of titanium nitride ortantalum nitride. The nitride cap layer 60L may be deposited by aconformal deposition method such as, for example, CVD or ALD and mayhave a thickness ranging from 3 nm to 30 nm, although lesser and greaterthicknesses can also be employed.

Referring to FIGS. 12A-12B, an organic planarization layer (OPL) (notshown) is formed over the nitride cap layer 60L to cover the sacrificialgate structures (122, 124, 126, 28) and the first and the secondepitaxial source/drain regions 32, 34. The OPL may include a flowableoxide or amorphous carbon to fill the gaps between the sacrificial gatestructures (122, 124, 126, 28) and the first and the second epitaxialsource/drain regions 32, 34. Following the deposition of the OPL, theOPL can be planarized, for example, by CMP using topmost surfaces of thenitride cap layer 60L as an etch stop so that a top surface of the ILDlayer 30 is coplanar with the topmost surfaces of the nitride linerlayer 60L.

The OPL is then recessed to provide OPL portions 62. An etch backprocess, such as, for example, RIE, can be performed to removes an upperportion of the OPL selectively to the nitride cap layer 60L. Therecessing depth is controlled such that the OPL portions 62 have aheight great enough to cover the first and the second epitaxialsource/drain regions 32, 34. Portions of the nitride cap layer 60L thatare located on the top surfaces of the sacrificial gate caps 26 andupper portions of sidewalls of the gate structures (122, 124, 126, 28)are thus exposed.

Referring to FIGS. 13A-13B, portions of the OPL portions 62 that arepresented at the boundary of the n-type FinFET region and p-type FinFETregion are removed to form gaps 66 between the first epitaxialsource/drain regions 32 and the second epitaxial source/drain regions34. The gaps 66 expose portions of horizontal portions of the nitridecap layer 60L located at the boundary of the n-type FinFET region andp-type FinFET region. Remaining portions of the OPL portions 62 areherein referred to as patterned OPL portions 64.

Referring to FIGS. 14A-14B, portions of the nitride cap layer 60L thatare not covered by the patterned OPL portions 64 are removed by at leastone etch. For example, portions of horizontal portions of the nitridecap layer 60L that are not covered by the pattern OPL portions 64 (i.e.,portions of the pattern OPL portions on the top surfaces of thesacrificial gate cap 126 and at the boundary of the n-type FinFET regionand p-type FinFET region) may be first removed by an anisotropic etch,such as, for example, RIE. Subsequently, portions of vertical portionsof the nitride cap layer 60 that are located on the upper portions ofsidewalls of the sacrificial gate structures (122, 124, 216, 28) may beremoved using an isotropic etch. Remaining portions of the nitride caplayer 60L are herein referred to as nitride cap layer portions 60. Theremoval of portions of the nitride cap layer 60L from the gaps 66electrically isolates the first epitaxial source/drain regions 32 fromthe second epitaxial source/drain regions 34.

After removing portions of the nitride cap layer 60L, the patterned OPLportions 64 may be removed by dry etching or chemical wet etching toexpose nitride cap layer portions 60. In one embodiment, the patternedOPL portions 64 can be removed by sulfuric acid.

Referring to FIGS. 15A-15B, the process steps of FIG. 4 are performed toform an ILD layer 40L. The ILD layer 40L covers the sacrificial gatestructures (122, 124, 126, 28), the nitride cap layer portions 60 andexposed surfaces of the substrate 8 and has a top surface coplanar withthe top surfaces of the sacrificial gate cap 126.

Referring to FIGS. 16A-16B, the sacrificial gate stacks (122, 124, 126)are removed to provide gate cavities (not shown). The sacrificial gatestacks (122, 124, 126) can be removed selectively to the substrate 8,the semiconductor fins 10 a, 10 b, the gate spacer 28 and the ILD layer40L by at least one etch. The at least one etch can be a wet chemicaletch such as an ammonia etch or a dry etch such as RIE. The gate cavityoccupies a volume from which each sacrificial gate stack (122, 124, 126)is removed and is laterally confined by inner sidewalls of the gatespacer 28.

Subsequently, functional gate stacks are formed in the gate cavities.Each of the functional gate stacks includes a gate dielectric 72, a gateconductor 74 and a gate cap 76. The functional gate stacks (72, 74, 76)can be formed by first depositing a conformal dielectric layer (notshown) on bottom surfaces and sidewalls of the gate cavities and to thetop surface of the ILD layer 40L. The conformal dielectric layer mayinclude a high-k dielectric material as described above in FIGS. 2A-2B.Remaining volumes of the gate cavities are then filled with a gateconductor layer (not show) including a conductive material as describedabove in FIGS. 2A-2B.

The portion of the gate conductor layer formed above the top surface ofthe ILD layer 40L can be removed, for example, by CMP. The portion ofthe gate dielectric layer that is formed above the top surface of theILD layer 40L may also be subsequently removed. In some embodiments andas illustrated, the remaining portions of the gate conductor layer andthe remaining portions of the gate dielectric layer may be recessedutilizing a dry etch or a wet chemical etch to provide a void (notshown) in each of the gate cavities. The recessed portions of the gateconductor layer constitute gate conductor 74, and the recessed portionsof the gate dielectric layer constitute gate dielectric 72.

A gate cap material (e.g., dielectric material described in FIGS. 2A-2B)is then deposited over the gate dielectric 72 and the gate conductor 74in the gate cavities to fill voids that are formed after recessing theremaining portions of the gate conductor layer and the remainingportions of the gate dielectric layer. Following the deposition of thegate cap material, the deposited gate cap material can be subsequentlyplanarized, for example, by CMP using the top surface of the ILD layer40 as an etch stop to provide the gate cap 76.

Referring to FIGS. 17A-17B, the processing steps of FIG. 5 are performedto form first and second source/drain contact openings 42, 44. The firstsource/drain contact openings 42 expose first epitaxial source/drainregions 32, while the second source/drain contact openings 44 exposesecond epitaxial source/drain regions 34. Since the nitride cap layerportions 60 have a good etch resistance to the etch chemistries that areemployed to form the first and the second source/drain contact openings42, 44, the nitride cap layer portions 60 act as an etch stop to preventdamages to the semiconductor materials of the first and second epitaxialsource/drain regions 32, 34 during the etch processes.

Referring to FIGS. 18A-18B, portions of the nitride cap layer portions60 that are exposed in the first and second source/drain contactopenings 42, 44 are removed selectively to the first and the secondepitaxial source/drain regions 32, 34, the gate spacer 28 and thesubstrate 8, while remaining portions of the nitride cap layer portion60 that are presented on sidewalls of the outermost gate structures (72,74, 76, 28) remain intact.

Subsequently, the processing steps of FIGS. 4-10 are performed to formsource/drain contact structures (not shown) with increased contact areasfor the first and second epitaxial source/drain regions 32, 34.

While the present application has been particularly shown and describedwith respect to various embodiments thereof, it will be understood bythose skilled in the art that the foregoing and other changes in formsand details may be made without departing from the spirit and scope ofthe present application. It is therefore intended that the presentapplication not be limited to the exact forms and details described andillustrated, but fall within the scope of the appended claims.

What is claimed is:
 1. A method of forming a semiconductor structurecomprising: forming at least one gate structure over a channel portionof each of a plurality of first semiconductor fins and a plurality ofsecond semiconductor fins; epitaxially growing a first semiconductormaterial on portions of each of the plurality of first semiconductorfins that are not covered by the at least one gate structure to providefirst epitaxial source/drain regions, wherein adjacent first epitaxialsource/drain regions are separated by a first gap; epitaxially growing asecond semiconductor material on portions of each of the plurality ofsecond semiconductor fins that is not covered by the at least one gatestructure to provide second epitaxial source/drain regions, whereinadjacent second epitaxial source/drain regions are separated by a secondgap; forming an interlevel dielectric (ILD) layer over the substrate,the ILD layer covering the at least one gate structure, the firstepitaxial source/drain regions and the second epitaxial source/drainregions; forming a pair of first source/drain contact openings and apair of second source source/drain contact openings through the ILDlayer on the opposite sides of the gate structure, wherein each of thefirst source/drain contact openings exposes an entirety of the firstepitaxial source/drain regions on one side of the gate structure, andwherein each of the second source/drain contact openings exposes anentirety of the second epitaxial source/drain regions on one side of thegate structure; forming first contact metal layer portions within thefirst source/drain contact openings and second contact metal layerportions within the second source/drain contact openings, the firstcontact metal layer portions completely filling each first gap betweenthe adjacent first epitaxial source/drain regions, the second contactmetal layer portions completely filling each second gap between theadjacent second epitaxial source/drain regions; removing the firstcontact metal layer portions to re-expose first epitaxial source/drainregions in the first source/drain contact openings; forming a contactliner layer on exposed surfaces of the first source/drain contactopenings, the first epitaxial source/drain regions, the second epitaxialsource/drain contact openings and the second contact metal layerportions, wherein portions of the contact liner layer in the firstsource/drain contact openings conform to the exposed surfaces of thefirst epitaxial source/drain regions; and forming a conductive filllayer within the first source/drain contact openings and the secondsource/drain contact openings to fill a remaining volume of each of thefirst source/drain contact openings and the second source/drain contactopenings.
 2. The method of claim 1, wherein the epitaxially growing thefirst semiconductor material on the portion of each of the plurality offirst semiconductor fins provides faceted first epitaxial source/drainregions having a diamond-shaped cross-section, and wherein theepitaxially growing the second semiconductor material on the portion ofeach of the plurality of second semiconductor fins provides facetedsecond epitaxial source/drain regions having a diamond-shapedcross-section.
 3. The method of claim 1, wherein the first epitaxialsource/drain regions are doped to a first conductivity, and the secondepitaxial source/drain regions are doped to a second conductivity,wherein the first conductivity is n-type and the second conductivity isp-type.
 4. The method of claim 3, further comprising diffusing dopantsfrom the first epitaxial source/drain regions into the plurality offirst semiconductor fins and dopants from the second epitaxialsource/drain regions into the plurality of second semiconductor fins byannealing.
 5. The method of claim 1, wherein the forming the firstcontact metal layer portions within the first source/drain contactopenings and the second contact metal layer portions within the secondsource/drain contact openings comprises: forming a conformal contactmetal layer in the first source/drain contact openings and the secondsource/drain contact openings, wherein the contact metal layercompletely fills each first gap between the adjacent first epitaxialsource/drain regions and each second gap between the adjacent secondepitaxial source/drain regions; and recessing the conformal contactmetal layer to provide the first contact metal layer portions in thefirst source/drain contact openings and the second contact metal layerportions in the second source/drain contact openings, wherein topsurfaces of the first contact metal layer portions are located abovetopmost surfaces of the first epitaxial source/drain regions, andwherein top surfaces of the second contact metal layer portions arelocated above topmost surfaces of the second epitaxial source/drainregions.
 6. The method of claim 1, wherein the forming the pair of firstsource/drain contact openings and the pair of second source source/draincontact openings through the ILD layer on the opposite sides of the gatestructure comprises: forming a photoresist on a top surface of the ILDlayer; patterning the photoresist to form openings; and transferring apattern of the openings in the photoresist through the ILD layer by ananisotropic etch.
 7. The method of claim 1, wherein the removing thefirst contact metal layer portions to re-expose first epitaxialsource/drain regions in the first source/drain contact openingscomprises: forming a mask layer over the first contact metal layerportions, the second contact metal layer portion and remaining portionsof the ILD layer; patterning the mask layer to expose the first contactmetal layer portions, wherein the second contact metal layer portionsremain covered by remaining portions of the mask layer; and removing theremaining portions of the mask layer.
 8. The method of claim 1, whereinthe at least one gate structure is a functional gate structurecomprising a functional gate stack including a gate dielectric, a gateconductor atop the gate dielectric and a gate cap atop the gateconductor, and a gate spacer located on each sidewall of the gate stack.9. The method of claim 1, wherein the at least one gate structure is asacrificial gate structure comprising a sacrificial gate stack includinga sacrificial gate dielectric, a sacrificial gate conductor atop thesacrificial gate dielectric and a sacrificial gate cap atop thesacrificial gate conductor, and a gate spacer located on each sidewallof the sacrificial gate stack.
 10. The method of claim 1, furthercomprising forming nitride cap layer portions over the first epitaxialsource/drain regions and the second epitaxial source/drain regions priorto the forming the first source/drain contact openings and the secondsource/drain contact openings.
 11. The method of claim 10, wherein theforming nitride cap layer portions over the first epitaxial source/drainregions and the second epitaxial source/drain regions comprises: forminga conformal nitride cap layer over the at least one gate structure, thefirst epitaxial source/drain regions, the second epitaxial source/drainregions and exposed surfaces of the substrate; forming an organicplanarization layer (OPL) over the nitride cap layer to cover the atleast one gate structure, the first epitaxial source/drain regions, thesecond epitaxial source/drain regions; recessing the OPL to provide OPLportions, wherein the OPL portions expose portions of the nitride caplayer located on upper portions of the at least one gate structure,wherein another portions of nitride cap layer located on the surfaces ofthe first epitaxial source/drain regions and the second epitaxialsource/drain region remain covered by the OPL portions; removingportions of the OPL portions present between a set of the firstepitaxial source/drain regions and a set of the second epitaxialsource/drain regions to expose portions of horizontal portions of thenitride cap layer located between the set of the first epitaxialsource/drain regions and the set of the second epitaxial source/drainregions; removing exposed portions of the nitride cap layer; andremoving remaining portions of the OPL portions.
 12. The method of claim11, wherein remaining portions of the nitride cap layer remains intactduring the steps of forming the first source/drain contact openings andthe second source/drain contact openings.
 13. The method of claim 11,further comprising removing the remaining portions of the nitride caplayer from the surfaces of the first epitaxial source/drain regions andthe second epitaxial source/drain regions after forming the firstsource/drain contact openings and the second source/drain contactopenings.